Wafer chuck lapping and polishing, custom chucks up to 450mm

Lapping and Polishing Wafer Chucks, Reconditioning, CNC Machining

Valley Design has over 30 years experience in vacuum chuck manufacturing, reconditioning and CNC machining. Advanced wafer chucks are produced ultra-flat with Angstrom level surface finishes, and parallellism to less than 1 micron (40 millionths of an inch) is attainable.

Vacuum chucks, also called Wafer vacuum chucks can be used for:

  • Inspection
  • Lithography
  • Wafer Dicing

Wafer dicing chucks are used to hold wafers on various models of dicing saws including DISCO, K&S and others.

Wafer chuck material:

  • Aluminum
  • Hardcoated Aluminum
  • Silicon Carbide
  • Ceramic
  • Titanium Oxide
  • Stainless Steel

Typical Specifications for vacuum chucks

  • Size: up to 450mm diameter (12") and larger
  • Flatness: to 1/2 light band (λ/4) - depending on size
  • Parallelism: to 1 micron and less is possible
  • Surface finish: Angstrom level - depending on material

Please call or e-mail for a quotation to meet your requirements.













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Valley Design East
Phoenix Park Business Center
2 Shaker Road, Bldg. E-001
Shirley, MA 01464
Phone: 978.425.3030
Fax: 978.425.3031
Valley Design
Santa Cruz, CA 95060  
Phone: 831.420.0595  
Fax: 831.420.0592

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